It depends on how you want to compare them. You could look at it from a funding perspective. The total cost of ITER through 2013-2025 is expected to be 20-65 billion.

Samsung just revealed they are investing 50 billion to build an EUV foundry. This is on top of all the knowledge and assets they already have. It does not include the R&D to get to the point where you can just buy EUV machines, etchers, atomic layer deposition, etc.